A METHOD OF DETERMINING GENERATION LIFETIME SUITABLE FOR COMPUTER-AIDED MEASUREMENT

被引：0
|
作者：
ZHANG, XM
机构：
[1] Dept. of Electron. Eng., Hangzhou Univ.
来源：
SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1992年 / 7卷 / 11期
关键词：
D O I：
10.1088/0268-1242/7/11/009
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new method of determining generation lifetime is suggested. By reading out several values of high-frequency mos capacitance with equal time intervals from a capacitance-time transient curve of a pulsed MOS capacitor, the generation lifetime of minority carriers can be determined. This method involves straight line regression and is suitable for computer-aided measurement.
引用
收藏
页码：1341 / 1343
页数：3
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