MICRO-FABRICATION OF CERAMIC USING LASER ENHANCED ETCHING

被引：0
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作者：
MITSUHASHI, M
OTSUKA, Y
TAGAWA, N
机构：
来源：
BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING | 1989年 / 23卷 / 02期
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中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
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页码：100 / 104
页数：5
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