Micro-fabrication assisted by laser trapped micro-particle tools

被引：0
|
作者：
Bai, J [1 ]
Zhu-Ge, ZR [1 ]
Wang, XN [1 ]
Hou, XY [1 ]
Yang, GG [1 ]
机构：
[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
来源：
MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS II | 2004年 / 5641卷
关键词：
laser trapping; micro-fabrication; radiation pressure;
D O I：
10.1117/12.576129
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel micro-fabrication technology using optical radiation pressure is presented. A simulation program has been written and simulation results have demonstrated that micro silica or diamond particles, trapped by focused laser beam, could be used as micro-fabrication tools for nanometer manufacturing. An experiment setup for laser trapping has been established and Silica particles, with diameter of 8 mum, has been successfully trapped in water and arbitrary-shaped diamond particles, whose size is about 3-8 mum, has been trapped and rotated as micro-fabrication tools. When trapped rigidity micro-particles tools was controlled by laser beam, the work stage was horizontally moved repeatedly so that a machining trace of 2nm on work piece has been attained.
引用
收藏
页码：219 / +
页数：3
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