LASER STIMULATION AND PROBING OF GAS-PHASE PROCESSING FOR MICROELECTRONICS

被引：0
|
作者：
DONNELLY, VM [1 ]
机构：
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1986年 / 3卷 / 13期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：P60 / P60
页数：1
相关论文
共 50 条
  • [41] GAS-PHASE LASER AS A SOURCE OF LIGHT FOR AN OPTICAL DIFFRACTOMETER
    HARBURN, G
    WALKLEY, K
    TAYLOR, CA
    [J]. NATURE, 1965, 205 (4976) : 1095 - &
  • [42] A multiwatt All Gas-phase Iodine Laser (AGIL)
    Manke, GC
    Cooper, CB
    Dass, SC
    Madden, TJ
    Hager, GD
    [J]. HIGH-POWER LASER ABLATION V, PTS 1 AND 2, 2004, 5448 : 251 - 260
  • [43] PULSED LASER PHOTOLYSIS OF CHROMIUM HEXACARBONYL IN THE GAS-PHASE
    BRECKENRIDGE, WH
    STEWART, GM
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1986, 108 (03) : 364 - 367
  • [44] THE LASER PHOTOELECTRON-SPECTRUM OF GAS-PHASE BENZENE
    LONG, SR
    MEEK, JT
    REILLY, JP
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (07): : 3206 - 3219
  • [45] LASER-INDUCED FLUORESCENCE OF NCS IN THE GAS-PHASE
    OHTOSHI, H
    TSUKIYAMA, K
    YANAGIBORI, A
    SHIBUYA, K
    OBI, K
    TANAKA, K
    [J]. CHEMICAL PHYSICS LETTERS, 1984, 111 (1-2) : 136 - 140
  • [46] Laser-generated silenes and their gas-phase polymerization
    Pola, J
    [J]. RADIATION PHYSICS AND CHEMISTRY, 1997, 49 (01) : 151 - 154
  • [47] Modeling of the all gas-phase iodine laser (AGIL)
    Madden, TJ
    Manke, GC
    Hager, GD
    [J]. XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers Pt 1 and 2, 2005, 5777 : 253 - 259
  • [48] LASER-INDUCED FLUORESCENCE OF NCO IN THE GAS-PHASE
    CHARLTON, TR
    OKAMURA, T
    THRUSH, BA
    [J]. CHEMICAL PHYSICS LETTERS, 1982, 89 (02) : 98 - 100
  • [49] LASER-INDUCED FLUORESCENCE OF CFBR IN THE GAS-PHASE
    PURDY, JR
    THRUSH, BA
    [J]. CHEMICAL PHYSICS LETTERS, 1980, 73 (02) : 228 - 230
  • [50] DC discharge for the all gas-phase iodine laser
    Short Wavelength Chemical Laser Laboratory, Dalian Institute of Chemical Physics, Chinese Academy of Sciences, P.O. Box 110, Dalian 116023, China
    [J]. Qiangjiguang Yu Lizishu, 2006, 5 (746-748):
12345