GENERATION OF 3-DIMENSIONAL FREESTANDING MICRO-OBJECTS BY LASER CHEMICAL-PROCESSING

被引：0
|
作者：
LEHMANN, O
STUKE, M
机构：
来源：
JOURNAL DE PHYSIQUE IV | 1991年 / 1卷 / C2期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Three-Dimensional free standing micro-objects in the micrometer range were created using Laser Chemical Vapor Deposition (LCVD) of aluminum from aluminum-trihydride-trimethylamine. A dense grid of thin lines (about 10-mu-m diameter) was deposited on a preformed polycarbonate substrate using a two-step-process. The substrate was removed by dissolving it in a suitable solvent after ablating an unsoluble by-product by UV excimer laser pulses. The result is a free-standing three-dimensional aluminum grid micro-structure.
引用
收藏
页码：337 / 342
页数：6
相关论文
共 50 条
  • [21] REVERSIBILITY OF 3-DIMENSIONAL OBJECTS
    DORNIC, S
    STUDIA PSYCHOLOGICA, 1966, 8 (01) : 46 - 53
  • [22] FEATURE EXTRACTION OF 3-DIMENSIONAL OBJECTS AND VISUAL PROCESSING IN A HAND-EYE SYSTEM USING LASER TRACKER
    ISHII, M
    NAGATA, T
    PATTERN RECOGNITION, 1976, 8 (04) : 229 - 237
  • [23] WAVELENGTH DECORRELATION OF LASER SPECKLE FROM 3-DIMENSIONAL DIFFUSE OBJECTS
    MARRON, JC
    OPTICS COMMUNICATIONS, 1992, 88 (4-6) : 305 - 308
  • [24] DETECTING OBJECTS IN 3-DIMENSIONAL LASER-RADAR RANGE IMAGES
    GREEN, TJ
    SHAPIRO, JH
    OPTICAL ENGINEERING, 1994, 33 (03) : 865 - 874
  • [25] Optical analysis of an optical probe for three-dimensional position detection of micro-objects
    Jang S.H.
    Asai T.
    Shimizu Y.
    Gao W.
    International Journal of Automation Technology, 2011, 5 (06) : 862 - 865
  • [26] ON THE REACTION-KINETICS IN LASER-INDUCED PYROLYTIC CHEMICAL-PROCESSING
    BAUERLE, D
    LUKYANCHUK, B
    PIGLMAYER, K
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (04): : 385 - 396
  • [27] Real-time three-dimensional orientation control of non-spherical micro-objects using laser trapping
    Tanaka, Y.
    Hirano, K.
    Nagata, H.
    Ishikawa, M.
    ELECTRONICS LETTERS, 2007, 43 (07) : 412 - 414
  • [28] Laser-Actuated Multi-Fingered Hand for Dexterous Manipulation of Micro-Objects
    Ta, Quang Minh
    Khan, Gulam Dastagir
    Li, Xiang
    Cheah, Chien Chern
    IEEE ACCESS, 2023, 11 : 29650 - 29660
  • [29] Stable poses of 3-dimensional objects
    Mason, R
    Rimon, E
    Burdick, J
    1997 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION - PROCEEDINGS, VOLS 1-4, 1997, : 391 - 398
  • [30] SUBJECTIVE CONTOURS IN 3-DIMENSIONAL OBJECTS
    KENNEDY, JM
    WARE, C
    BULLETIN OF THE PSYCHONOMIC SOCIETY, 1977, 10 (04) : 249 - 249
12345