GENERATION OF 3-DIMENSIONAL FREESTANDING MICRO-OBJECTS BY LASER CHEMICAL-PROCESSING

被引：0
|
作者：
LEHMANN, O
STUKE, M
机构：
来源：
JOURNAL DE PHYSIQUE IV | 1991年 / 1卷 / C2期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Three-Dimensional free standing micro-objects in the micrometer range were created using Laser Chemical Vapor Deposition (LCVD) of aluminum from aluminum-trihydride-trimethylamine. A dense grid of thin lines (about 10-mu-m diameter) was deposited on a preformed polycarbonate substrate using a two-step-process. The substrate was removed by dissolving it in a suitable solvent after ablating an unsoluble by-product by UV excimer laser pulses. The result is a free-standing three-dimensional aluminum grid micro-structure.
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页码：337 / 342
页数：6
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