TRIMETHYLGALLIUM SUPPLY WITHOUT THE USE OF BUBBLING IN GAAS GROWTH BY METALORGANIC VAPOR-PHASE EPITAXY

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作者
OHUCHI, A
OHNO, H
OHTSUKA, S
HASEGAWA, H
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 12期
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D O I
10.1143/JJAP.27.2420
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O59 [应用物理学];
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页码:2420 / 2420
页数:1
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