SAFETY, INDUSTRIAL-HYGIENE, AND ENVIRONMENTAL CONSIDERATIONS FOR MOCVD REACTOR SYSTEMS

被引：0
|
作者：
ROYCHOWDHURY, M
机构：
[1] Texas Instruments, Dallas, United States
来源：
SOLID STATE TECHNOLOGY | 1991年 / 34卷 / 01期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：36 / 38
页数：3
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