ION-BEAM STUDIES .5. COMPUTER-SIMULATION OF COMPOSITE ION-IMPLANTATION PROFILES

被引：2
|
作者：
FREEMAN, JH [1 ]
BOOKER, DV [1 ]
机构：
[1] AERE,DIV CHEM,HARWELL DIDCOT,BERKSHIRE,ENGLAND
来源：
NUCLEAR INSTRUMENTS & METHODS | 1977年 / 144卷 / 02期
关键词：
D O I：
10.1016/0029-554X(77)90107-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：175 / 181
页数：7
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