HEXAGONAL IRON NITRIDE THIN-FILMS PREPARED BY PLASMA REACTION

被引：9
|
作者：
SAITO, Y
TANAKA, H
FUJITA, K
机构：
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1986年 / 5卷 / 11期
关键词：
D O I：
10.1007/BF01742235
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1166 / 1168
页数：3
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