INSITU ELLIPSOMETRY AS A DIAGNOSTIC OF THIN-FILM GROWTH - STUDIES OF AMORPHOUS-CARBON

被引：26
|
作者：
COLLINS, RW [1 ]
机构：
[1] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词：
D O I：
10.1116/1.576289
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1378 / 1385
页数：8
相关论文
共 50 条
  • [21] STUDIES OF THIN-FILM GROWTH OF SPUTTERED HYDROGENATED AMORPHOUS-SILICON
    MOUSTAKAS, TD
    SOLAR ENERGY MATERIALS, 1982, 8 (1-3): : 187 - 204
  • [22] Amorphous carbon overcoat for thin-film disk
    Yamamoto, T
    Hyodo, H
    TRIBOLOGY INTERNATIONAL, 2003, 36 (4-6) : 483 - 487
  • [23] INSITU MAGNETIZATION LOOP TRACER FOR THIN-FILM GROWTH
    HAUGDAHL, JB
    MILLER, DR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (03): : 480 - 483
  • [24] INSITU PHOTOCONDUCTIVE MONITORING OF PHTHALOCYANINE THIN-FILM GROWTH
    MINAMI, N
    ASAI, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1991, 30 (4A): : L643 - L646
  • [25] HEATING STAGE FOR INSITU STUDIES OF THIN-FILM REACTIONS
    SCHWARZ, RB
    RUBIN, JB
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (05): : 1292 - 1295
  • [26] INSITU ELECTRON-MICROSCOPY OF THIN-FILM GROWTH
    POCZA, JF
    BARNA, A
    BARNA, PB
    POZSGAI, I
    RADNOCZI, G
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : 525 - 532
  • [27] MODELING STUDIES OF AMORPHOUS-CARBON
    BEEMAN, D
    SILVERMAN, J
    LYNDS, R
    ANDERSON, MR
    PHYSICAL REVIEW B, 1984, 30 (02): : 870 - 875
  • [28] In situ ellipsometry studies of ZnS thin film growth
    Ajou Univ, Suwon, Korea, Republic of
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (08): : 5346 - 5350
  • [29] In situ ellipsometry studies of ZnS thin film growth
    Lee, S
    Park, BH
    Oh, SG
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (08): : 5346 - 5350
  • [30] DIAMOND-LIKE PROPERTIES OF AMORPHOUS-CARBON AND HYDROGENATED AMORPHOUS-CARBON THIN-FILMS
    DEMICHELIS, F
    TAGLIAFERRO, A
    DASGUPTA, D
    SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3): : 218 - 223
12345