RARE-EARTH BETA-DIKETONATE AND CARBOXYLATE METAL-COMPLEXES AS PRECURSORS FOR MOCVD OF OXIDE-FILMS

被引：7
|
作者：
KUZMINA, NP
MARTYNENKO, LI
TU, ZA
KAUL, AR
GIRICHEV, GV
GIRICHEVA, NI
RYKOV, AN
KORENEV, YM
机构：
来源：
JOURNAL DE PHYSIQUE IV | 1993年 / 3卷 / C3期
关键词：
D O I：
10.1051/jp4:1993353
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Volatile and thermostable complexs of lanthanide acetylacetonates and pivalates were obtained and investigated by different methods. These compounds were used for lanthanide oxide containing film producing and for fabrication of silica optical fibers doped by lanthanide oxide. The properties of these and already known volatile precursors are compared.
引用
收藏
页码：385 / 390
页数：6
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