PHYSICS OF ION PLATING AND ION-BEAM DEPOSITION

被引:88
|
作者
AISENBERG, S [1 ]
CHABOT, RW [1 ]
机构
[1] WHITTAKER CORP, SPACE SCI DIV, WALTHAM, MA 02154 USA
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D O I
10.1116/1.1317915
中图分类号
O59 [应用物理学];
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页码:104 / 107
页数:4
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