SEM 3-DIMENSIONAL MEASUREMENT METHOD AND COMPUTER-PROCESSING METHOD

被引：0
|
作者：
OKADA, M
KOBORI, T
KAWANO, T
SHINOZAKI, S
机构：
[1] JEOL LTD,POWER REACT NUCL FUEL DEV,TOKYO,JAPAN
[2] IBM JAPAN,TOKYO,JAPAN
来源：
JOURNAL OF ELECTRON MICROSCOPY | 1979年 / 28卷 / 03期
关键词：
D O I：
暂无
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
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页码：228 / 228
页数：1
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