A BOUNDED-ERROR APPROACH TO ACCURACY ANALYSIS IN ELLIPSOMETRY

被引：2

作者：

SMIT, MK ^{[1
]}

VERHOOF, JW ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DEPT ELECT ENGN,TELECOMMUN & REMOTE SENSING TECHNOL LAB,2600 GA DELFT,NETHERLANDS

来源：

MATHEMATICS AND COMPUTERS IN SIMULATION | 1990年 / 32卷 / 5-6期

关键词：

D O I：

10.1016/0378-4754(90)90010-G

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

A nonlinear Bounded-Error Estimation method is applied to the case of ellipsometric measurement of film properties. It is shown that this method can be used with advantage for estimating the magnitude of the measurement errors including systematic errors.

引用

页码：545 / 551

页数：7

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