DIGITAL PHASE MEASURING FIZEAU INTERFEROMETER FOR TESTING OF FLAT AND SPHERICAL SURFACES

被引:0
|
作者
CHEN, J
MURATA, K
机构
来源
OPTIK | 1988年 / 81卷 / 01期
关键词
D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:28 / 32
页数:5
相关论文
共 50 条
  • [41] Advanced simultaneous phase-shifting Fizeau interferometer
    Zhu, Wenhua
    Chen, Lei
    Yang, Ying
    Zhang, Rui
    Zheng, Donghui
    Han, Zhigang
    Li, Jinpeng
    OPTICS AND LASER TECHNOLOGY, 2019, 111 : 134 - 139
  • [42] Design of 24" phase-shifting Fizeau interferometer
    Ai, CY
    Knowlden, R
    Lamb, J
    OPTICAL MANUFACTURING AND TESTING II, 1997, 3134 : 447 - 455
  • [43] Phase measurement algorithm in wavelength scanned Fizeau interferometer
    Hanayama, R
    Hibino, K
    Warisawa, S
    Mitsuishi, M
    OPTICAL REVIEW, 2004, 11 (05) : 337 - 343
  • [44] Laser Fizeau interferometer for silicon wafer site flatness testing
    Novak, E
    Olszak, A
    Stumpe, K
    Knowlden, B
    Malevanchik, L
    Angeli, G
    SURFACE CHARACTERIZATION FOR COMPUTER DISKS, WAFERS, AND FLAT PANEL DISPLAYS, 1999, 3619 : 101 - 109
  • [45] Fizeau interferometer for phase shifting interferometry in ultrahigh vacuum
    Kaiser, S
    Maier, T
    Grossmann, A
    Zimmermann, C
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (09): : 3726 - 3727
  • [46] Phase Measurement Algorithm in Wavelength Scanned Fizeau Interferometer
    Ryohei Hanayama
    Kenichi Hibino
    Shin’ichi Warisawa
    Mamoru Mitsuishi
    Optical Review, 2004, 11 : 337 - 343
  • [47] Design of a 24'' phase-shifting Fizeau interferometer
    Ai, CY
    Knowlden, B
    Lamb, J
    LASER INTERFEROMETRY VIII: TECHNIQUES AND ANALYSIS, 1996, 2860 : 398 - 403
  • [48] Optical resolution of phase measurements of laser Fizeau interferometer
    Novak, E
    Ai, CY
    Wyant, JC
    LBOC - THIRD INTERNATIONAL WORKSHOP ON LASER BEAM AND OPTICS CHARACTERIZATION, 1996, 2870 : 545 - 552
  • [49] Phase-shift Fizeau interferometer in presence of vibration
    Doloca, Radu
    Broistedt, Hagen
    Tutsch, Rainer
    INTERFEROMETRY XIV: APPLICATIONS, 2008, 7064
  • [50] BIREFRINGENT COMMON-PATH INTERFEROMETER FOR TESTING LARGE CONVEX SPHERICAL SURFACES
    XIANG, Y
    XIANG, CX
    ZHANG, GD
    OPTICAL ENGINEERING, 1993, 32 (05) : 1080 - 1083