METHOD OF THE ABERRATION CALCULATION IN THE PROJECTION SYSTEM WITH ELECTROSTATIC LENSES

被引：0

作者：

YATCHMENEV, SN

机构：

来源：

RADIOTEKHNIKA I ELEKTRONIKA | 1986年 / 31卷 / 01期

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D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：144 / 149

页数：6

共 50 条

[31] SYSTEMATIC TRANSFORMATION OF ABERRATION COEFFICIENTS OF QUADRUPOLES AND ELECTROSTATIC ROUND LENSES
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