HIGH DEPOSITION RATE SPUTTERED ZNO THIN-FILMS FOR BAW AND SAW APPLICATIONS

被引：0
|
作者：
DEFRANOULD, P [1 ]
机构：
[1] THOMSON CSF,DASM,F-06802 CAGNES MER,FRANCE
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1982年 / 29卷 / 03期
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D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
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页码：173 / 174
页数：2
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