CARBON-FILAMENT SOURCE FOR P-TYPE DOPING IN MOLECULAR-BEAM EPITAXY

被引：2

作者：

MAK, A ^{[1
]}

JOHNSON, SR ^{[1
]}

LAVOIE, C ^{[1
]}

MACKENZIE, J ^{[1
]}

NISSEN, MK ^{[1
]}

ROGERS, D ^{[1
]}

TIEDJE, T ^{[1
]}

机构：

[1] UNIV BRITISH COLUMBIA,DEPT ELECT ENGN,VANCOUVER V6T 1Z1,BC,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 03期

关键词：

D O I：

10.1116/1.587307

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1407 / 1409

页数：3

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