ELECTRON-BEAM CHARGING THERMOGRAPHY - A NOVEL TECHNIQUE TO STUDY THERMAL EFFECTS AT MIRRORS OF LASER-DIODES

被引：0
|
作者：
JAKUBOWICZ, A
机构：
来源：
MICROSCOPY OF SEMICONDUCTING MATERIALS 1993 | 1993年 / 134期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The charging of insulating films in a scanning electron microscope is shown to be a highly useful thermographic technique to reveal hot regions in microelectronic devices with a spatial resolution in the submicron range. This technique has been applied to investigate mirrors of GaAs/AlGaAs graded index separate confinement single quantum well laser diodes. Thermographic images of these mirrors have been obtained with a spatial resolution of 0.25 mu m. The proposed technique makes it possible to image fast thermal phenomena.
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页码：265 / 268
页数：4
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