Structure characteristics and piezoresistive effect of nc-Si:H films

被引：0
|
作者：
He, YL
Wu, XH
Lin, HY
Wang, H
Li, C
机构：
来源：
CHINESE SCIENCE BULLETIN | 1995年 / 40卷 / 20期
关键词：
nano-crystalline silicon film; piezoresistive effect;
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
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页码：1684 / 1687
页数：4
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