SPOTTY DEFECTS IN OXIDIZED FLOATING-ZONED DISLOCATION-FREE SILICON CRYSTALS

被引：21

|

作者：

MATSUI, J

KAWAMURA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1972年 / 11卷 / 02期

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D O I：

10.1143/JJAP.11.197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：197 / &

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