SOL-GEL-DERIVED TIN OXIDE THIN-FILMS

被引：93
|
作者：
PARK, SS
MACKENZIE, JD
机构：
[1] Department of Materials Science and Engineering, University of California-Los Angeles, Los Angeles
来源：
THIN SOLID FILMS | 1995年 / 258卷 / 1-2期
关键词：
ELECTRICAL PROPERTIES AND MEASUREMENTS; ELECTRON MICROSCOPY; OPTICAL PROPERTIES; TIN OXIDE;
D O I：
10.1016/0040-6090(94)06404-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Transparent conducting thin films of SnO2-x have been prepared from tin alkoxide by dip coating. The influence of the dip coating parameters such as solution concentration, the withdrawal speed of substrates from solution, firing temperature, and the number of coating applications on the thickness, electrical and optical properties of the films was investigated. The study demonstrates that the films with thickness of 0.8-1.1 mu m have sheet resistances as low as 52-85 Omega rectangle(-1) (or a resistivity of about 6 x 10(-3) Omega cm) and average visible transmittance of 84-89% in the wavelength range 0.4-0.7 mu m. The morphology, surface structure and composition of the films were investigated by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, and Auger electron spectroscopy.
引用
收藏
页码：268 / 273
页数：6
相关论文
共 50 条
  • [31] Characterization of sol-gel-derived silica films
    J Non Cryst Solids, 1-2 (72):
  • [32] Understanding of the development of in-plane residual stress in sol-gel-derived metal oxide thin films
    Ohno, Kentaro
    Uchiyama, Hiroaki
    Kozuka, Hiromitsu
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (01)
  • [33] Synthesis and Raman investigation of sol-gel-derived relaxor ferroelectric thin films
    Kumar, Ashok
    Katiyar, R. S.
    JOURNAL OF RAMAN SPECTROSCOPY, 2007, 38 (10) : 1307 - 1310
  • [34] Effect of Nb doping on the microstructure of sol-gel-derived PZT thin films
    Klissurska, Radosveta D.
    Brooks, Keith G.
    Reaney, Ian M.
    Pawlaczyk, Czezlaw
    Kosec, Marija
    Setter, Nava
    Journal of the American Ceramic Society, 1995, 78 (06): : 1513 - 1520
  • [35] Microstructural evolution of ion-irradiated sol-gel-derived thin films
    Shojaee, S. A.
    Qi, Y.
    Wang, Y. Q.
    Mehner, A.
    Lucca, D. A.
    JOURNAL OF MATERIALS SCIENCE, 2017, 52 (20) : 12109 - 12120
  • [36] Powders, fibers, thin films and aerogels:: Sol-gel-derived piezoelectric materials
    Löbmann, P
    Lange, U
    Glaubitt, W
    Hutter, F
    Sporn, D
    HIGH-PERFORMANCE CERAMICS 2001, PROCEEDINGS, 2002, 224-2 : 613 - 618
  • [37] Aerosol-generated sol-gel-derived thin films as biosensing platforms
    Jordan, JD
    Dunbar, RA
    Bright, FV
    ANALYTICA CHIMICA ACTA, 1996, 332 (01) : 83 - 91
  • [38] Crystallization behavior of sol-gel-derived strontium barium niobate thin films
    Koo, J
    Jang, JH
    Bae, BS
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2001, 84 (01) : 193 - 199
  • [39] Sol-gel-derived c-axis oriented ZnO thin films
    Bao, DH
    Gu, HS
    Kuang, AX
    THIN SOLID FILMS, 1998, 312 (1-2) : 37 - 39
  • [40] Proton conduction in nanopores of sol-gel-derived porous glasses and thin films
    Daiko, Yusuke
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2014, 70 (02) : 172 - 179
12345