LIQUID JUNCTIONS FOR CHARACTERIZATION OF ELECTRONIC MATERIALS .4. IMPEDANCE SPECTROSCOPY OF REACTIVE ION-ETCHED SI

被引：7
|
作者：
FANTINI, MCA [1 ]
SHEN, WM [1 ]
TOMKIEWICZ, M [1 ]
GAMBINO, JP [1 ]
机构：
[1] IBM CORP,HOPEWELL JUNCTION,NY 12533
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 05期
关键词：
D O I：
10.1063/1.344310
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2148 / 2155
页数：8
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