TENSILE TESTING MACHINE FOR THIN-FILMS

被引：6

作者：

HENNING, CAO

BOSWELL, FW

CORBETT, JM

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1972年 / 5卷 / 12期

关键词：

D O I：

10.1088/0022-3735/5/12/029

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1231 / &

共 50 条

[31] PREPARATION OF FREESTANDING CVD TUNGSTEN THIN-FILMS FOR MECHANICAL TESTING
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