CHARACTERIZATION OF NITRIDE COATINGS BY AUGER-ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY

被引：122

|

作者：

HOFMANN, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573680

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：2789 / 2796

页数：8

相关论文

共 50 条

[31] PRECISION, ACCURACY, AND UNCERTAINTY IN QUANTITATIVE SURFACE-ANALYSES BY AUGER-ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY
POWELL, CJ
SEAH, MP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (02): : 735 - 763
[32] ROLE OF MULTIPLE-SCATTERING IN X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON DIFFRACTION IN CRYSTALS
EGELHOFF, WF
[J]. PHYSICAL REVIEW LETTERS, 1987, 59 (05) : 559 - 562
[33] Electron effective attenuation lengths for applications in Auger-electron spectroscopy and x-ray photoelectron spectroscopy
Powell, CJ
Jablonski, A
[J]. SURFACE AND INTERFACE ANALYSIS, 2002, 33 (03) : 211 - 229
[34] Growth and trends in Auger-electron spectroscopy and x-ray photoelectron spectroscopy for surface analysis
Powell, CJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (05): : S42 - S53
[35] STUDY OF AMORPHOUS AND CRYSTALLIZED FE75B25 BY AUGER-ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY
SHARMA, SK
HOFMANN, S
[J]. APPLIED SURFACE SCIENCE, 1991, 51 (3-4) : 139 - 155
[36] SEGREGATION OF AS ON GAAS(100) SURFACE DURING ABRASION PROCESS STUDIED BY X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY
IIJIMA, Y
MURAMOTO, K
UEMURA, M
HIRAOKA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (11A): : 5080 - 5084
[37] AUGER-ELECTRON SPECTROSCOPY X-RAY PHOTOELECTRON-SPECTROSCOPY STUDY OF TI-B-N THIN-FILMS
BAKER, MA
STEINER, A
HAUPT, J
GISSLER, W
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 1633 - 1638
[38] AN INSITU FRACTURE STAGE FOR X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER-ELECTRON SPECTROSCOPY STUDIES OF INTERNAL SURFACES IN POLYCRYSTALLINE MATERIALS
BRUESCH, P
FODITSCH, W
STUCKI, F
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06): : 3334 - 3339
[39] X-RAY PHOTOELECTRON-SPECTROSCOPY OF HAFNIUM NITRIDE
BRUNINX, E
VANEENBERGEN, AFPM
VANDERWERF, P
HAISMA, J
[J]. JOURNAL OF MATERIALS SCIENCE, 1986, 21 (02) : 541 - 546
[40] SHARING OF AUGER-ELECTRON SPECTROSCOPY AND X-RAY PHOTOELECTRON-SPECTROSCOPY SPECTRAL DATA WITH THE COMMON DATA-PROCESSING SYSTEM
YOSHIHARA, K
YOSHITAKE, M
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (04): : 2342 - 2347

← 1 2 3 4 5 →