GALLIUM-ARSENIDE LARGE-SCALE INTEGRATED-CIRCUITS

被引：3

作者：

LONG, SI

WELCH, BM

ZUCCA, R

EDEN, RC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 03期

关键词：

D O I：

10.1116/1.571120

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：531 / 536

页数：6

共 50 条

[31] MOLYBDENUM METALLIZATION SYSTEM FOR LARGE-SCALE INTEGRATED-CIRCUITS
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