SURFACE MODIFICATION OF INP BY PLASMA TECHNIQUES USING HYDROGEN AND OXYGEN

被引：18
|
作者：
CLARK, DT
FOK, T
机构：
来源：
THIN SOLID FILMS | 1981年 / 78卷 / 03期
关键词：
D O I：
10.1016/0040-6090(89)90593-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：271 / 278
页数：8
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