DIRECT LASER GENERATION OF LARGE FIELD HIGH-RESOLUTION THIN METAL-FILM PATTERNS

被引：0
|
作者：
TOWNSEND, WP [1 ]
ZALECKAS, VJ [1 ]
MUNIZ, JM [1 ]
机构：
[1] WESTERN ELECT CO INC,PRINCETON,NJ 08540
来源：
IEEE JOURNAL OF QUANTUM ELECTRONICS | 1979年 / 15卷 / 09期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：D48 / D49
页数：2
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