DIRECT LASER GENERATION OF LARGE FIELD HIGH-RESOLUTION THIN METAL-FILM PATTERNS

被引：0
|
作者：
TOWNSEND, WP [1 ]
ZALECKAS, VJ [1 ]
MUNIZ, JM [1 ]
机构：
[1] WESTERN ELECT CO INC,PRINCETON,NJ 08540
来源：
IEEE JOURNAL OF QUANTUM ELECTRONICS | 1979年 / 15卷 / 09期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：D48 / D49
页数：2
相关论文
共 50 条
  • [1] DIRECT DEPOSITION OF METAL-FILM PATTERNS USING NITROGEN LASER
    REZNIKOVA, EF
    CHESNOKOV, VV
    ZHARKOVA, GI
    IGUMENOV, IK
    JOURNAL DE PHYSIQUE IV, 1995, 5 (C5): : 687 - 694
  • [2] THE PROBLEM OF THE INTERPRETATION OF FIELD EMISSION PATTERNS OF METAL-FILM CATHODES
    SHREDNIK, VN
    SOVIET PHYSICS-SOLID STATE, 1960, 1 (07): : 1037 - 1042
  • [3] MEAN-FIELD THEORY OF HETEROEPITAXIAL THIN METAL-FILM MORPHOLOGIES
    CHANG, TM
    CARTER, EA
    SURFACE SCIENCE, 1994, 318 (1-2) : 187 - 203
  • [4] LIFETIMES AND RADIATION-PATTERNS OF LUMINESCENT CENTERS CLOSE TO A THIN METAL-FILM
    LUKOSZ, W
    MEIER, M
    OPTICS LETTERS, 1981, 6 (05) : 251 - 253
  • [5] Research Progress of High-Resolution Direct Laser Writing Lithography Based on Phase Change Thin Film (Invited)
    Guo, Jialong
    Wei, Tao
    Wei, Jingsong
    Hu, Jing
    Cheng, Miao
    Liu, Qianqian
    Wang, Ruirui
    Li, Wanfei
    Liu, Bo
    CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2024, 51 (12):
  • [6] SELECTIVE LASER OXIDATION OF THIN METAL-FILM AS AN EFFECT OF DIFFERENT THERMAL REGIMES
    BARBORICA, A
    CHITICA, N
    DINESCU, M
    MIHAILESCU, IN
    URSU, I
    THIN SOLID FILMS, 1994, 238 (02) : 276 - 279
  • [7] High-resolution laser fabrication of amplitude diffractive structures on thin metal films
    Korolkov, Victor P.
    Mikerin, Sergey L.
    Okotrub, Konstantin A.
    Sametov, Alexander R.
    Malyshev, Anatoly I.
    NANOPHOTONICS AND MICRO/NANO OPTICS IV, 2018, 10823
  • [8] DIRECT HIGH-RESOLUTION EXCIMER LASER PHOTOETCHING
    RICE, S
    JAIN, K
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 33 (03): : 195 - 198
  • [9] FIELD-EMISSION ENERGY-DISTRIBUTION OF ELECTRONS FROM A THIN METAL-FILM
    WYSOCKI, JK
    STARK, D
    SURFACE SCIENCE, 1991, 247 (2-3) : 402 - 407
  • [10] GENERATION OF HIGH-RESOLUTION LARGE-AREA PATTERNS BY X-RAY LITHOGRAPHY
    MAYDAN, D
    COQUIN, GA
    MALDONAD.JR
    SOMEKH, SR
    TAYLOR, GN
    LENZO, PV
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1974, ED21 (11) : 743 - 743
12345