ADVANCED BEAM-SHAPING TECHNIQUES FOR ELECTRON LITHOGRAPHY

被引：0
|
作者：
PFEIFFER, HC [1 ]
LANGNER, GO [1 ]
机构：
[1] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C152 / C152
页数：1
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