ADVANCED BEAM-SHAPING TECHNIQUES FOR ELECTRON LITHOGRAPHY

被引：0
|
作者：
PFEIFFER, HC [1 ]
LANGNER, GO [1 ]
机构：
[1] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C152 / C152
页数：1
相关论文
共 50 条
  • [1] OCTAGONAL BEAM-SHAPING APERTURE FOR E-BEAM LITHOGRAPHY.
    Anon
    IBM technical disclosure bulletin, 1985, 27 (10 A):
  • [2] SHAPING OF BEAM-SHAPING OPTICS
    BROWN, LB
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1981, 299 : 124 - 132
  • [3] ADVANCED MULTIPLE BEAM-SHAPING DIAPHRAGM FOR EFFICIENT EXPOSURE
    ELSNER, H
    DORING, HJ
    SCHACKE, H
    DAHM, G
    KOOPS, HWP
    MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 85 - 88
  • [4] FLEXIBLE BEAM-SHAPING DEVICE
    GOITEIN, M
    RADIOLOGY, 1974, 110 (03) : 734 - 735
  • [5] DESIGN OF BEAM-SHAPING OPTICS
    BRAAT, J
    APPLIED OPTICS, 1995, 34 (15): : 2665 - 2670
  • [6] ON THE THEORY OF ANTENNA BEAM-SHAPING
    DUNBAR, AS
    PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1951, 39 (06): : 718 - 719
  • [7] Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography
    Dominik Weber
    Robert Heimburger
    Dirk Hildebrand
    Toni Junghans
    Gianina Schondelmaier
    Christian Walther
    Daniel Schondelmaier
    Applied Physics A, 2019, 125
  • [8] Simplified mesh techniques for design of beam-shaping diffractive optical elements
    Bhattacharya, Shanti
    OPTIK, 2008, 119 (07): : 321 - 328
  • [9] Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography
    Weber, Dominik
    Heimburger, Robert
    Hildebrand, Dirk
    Junghans, Toni
    Schondelmaier, Gianina
    Walther, Christian
    Schondelmaier, Daniel
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2019, 125 (05):
  • [10] BEAM-SHAPING METHODS IN ANTENNA DESIGN
    VANATTA, LC
    PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1946, 34 (02): : W92 - W92
12345