共 50 条
- [1] A study on hermetic glass sealing using a modified direct bonding method [J]. MATERIALS FOR MECHANICAL AND OPTICAL MICROSYSTEMS, 1997, 444 : 123 - 129
- [2] Effect of passivation on frit glass bonding method for wafer level hermetic sealing on MEMS devices [J]. PROCEEDINGS OF 5TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE, 2003, : 307 - 310
- [3] Fabrication of a hermetic sealing device using low temperature intrinsic-silicon/glass bonding [J]. ICEP-IAAC - Int. Conf. Electron. Packag. iMAPS All Asia Conf., (444-447):
- [4] Fabrication of a Hermetic Sealing Device Using Low Temperature Intrinsic-Silicon/Glass Bonding [J]. 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC), 2015, : 444 - 447
- [5] Al-Ge Diffusion Bonding for Hermetic Sealing Application [J]. Journal of Electronic Materials, 2015, 44 : 2387 - 2395
- [8] Ultrasonic bonding of In/Au and Al/Al for hermetic sealing of MEMS packaging [J]. FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2002, : 415 - 418
- [9] Glass direct bonding technology for hermetic seal package [J]. MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, : 186 - 190
- [10] A METHOD FOR HERMETIC SEALING OF GLASS TUBES TO BE FILLED WITH POLYACRYLAMIDE-GEL [J]. LABORATORNOE DELO, 1990, (09): : 76 - 77