DIAMOND RESISTORS FABRICATED MONOLITHICALLY ON DIAMOND FILM SUBSTRATE

被引：0
|
作者：
DAVIDSON, JL [1 ]
SHOR, JS [1 ]
WUR, D [1 ]
KURTZ, AD [1 ]
机构：
[1] KULITE INC,LEONIA,NJ 07605
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1994年 / 141卷 / 12期
关键词：
D O I：
10.1149/1.2059364
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
A novel fabrication process for monolithic, electrically isolated diamond resistors is discussed. Selective growth of p-type diamond resistors on undoped diamond has been accomplished by using SiO2 as a sacrificial, ''lift-off'' layer. Diamond resistors with linewidths less than 10 mu m exhibited resistivities of 10 to 20 Omega-cm. No measurable leakage between the resistors or to the substrate was observed.
引用
下载
收藏
页码：3522 / 3525
页数：4
相关论文
共 50 条
  • [1] Pattern metallization on diamond thick film substrate
    Wang, JY
    Chen, HY
    Bai, YZ
    Lu, XY
    Jin, ZS
    DIAMOND AND RELATED MATERIALS, 2000, 9 (9-10) : 1632 - 1635
  • [2] Synthesis of diamond film on AlN substrate by PCVD
    Univ of Science and Technology of, China, Hefei, China
    Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology, 1997, 17 (02): : 135 - 137
  • [3] Evaluation of diamond film on cemented carbide substrate
    Zhou, KS
    Dai, MJ
    Kuang, TC
    Wang, DZ
    Liu, ZY
    SURFACE ENGINEERING, 1999, 15 (02) : 105 - 108
  • [4] FABRICATION PROCESS-DEVELOPMENT AND CHARACTERIZATION OF POLYCRYSTALLINE DIAMOND FILM RESISTORS
    EDWARDS, LM
    DAVIDSON, JL
    DIAMOND AND RELATED MATERIALS, 1993, 2 (5-7) : 808 - 811
  • [5] Diamond Schottky barrier diodes fabricated on sapphire-based freestanding heteroepitaxial diamond substrate
    Kwak, Taemyung
    Lee, Jonggun
    Choi, Uiho
    So, Byeongchan
    Yoo, Geunho
    Kim, Seongwoo
    Nam, Okhyun
    DIAMOND AND RELATED MATERIALS, 2021, 114 (114)
  • [6] Investigations of Ta film resistors on chemically vapor deposited diamond plates
    Zhu, XD
    Wang, H
    Zhan, RJ
    Zhou, HY
    APPLIED SURFACE SCIENCE, 1999, 153 (01) : 19 - 22
  • [7] Semiconductor laser fabricated with heat sink of diamond film
    Jilin Univ, Changchun, China
    Pan Tao Ti Hsueh Pao, 11 (840-843):
  • [8] Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter
    Tang, IT
    Chen, HJ
    Hwang, WC
    Wang, YC
    Houng, MP
    Wang, YH
    JOURNAL OF CRYSTAL GROWTH, 2004, 262 (1-4) : 461 - 466
  • [9] Effect of substrate on the characteristics of the interface between diamond film and substrate
    Francois, N
    Kim, SH
    Park, YS
    Lee, JW
    Hahn, IT
    Yun, WS
    DIAMOND AND RELATED MATERIALS, 1997, 6 (08) : 959 - 963
  • [10] Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate
    Wang, Yan-Feng
    Chang, Xiaohui
    Liu, Zhangcheng
    Liu, Zongchen
    Fu, Jiao
    Zhao, Dan
    Shao, Guoqing
    Wang, Juan
    Zhang, Shaopeng
    Liang, Yan
    Zhu, Tianfei
    Wang, Wei
    Wang, Hong-Xing
    JOURNAL OF CRYSTAL GROWTH, 2018, 489 : 51 - 56
12345