NUMERICAL SIMULATION OF IMPURITIES DIFFUSION IN SILICON - APPLICATIONS

被引：0

作者：

MONNIER, J

VANDORPE, D

STERN, M

CHAMBERT, G

HILLERET, N

MAFFEI, A

机构：

来源：

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D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C239 / &

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[1] NUMERICAL-ANALYSIS OF SIMULTANEOUS DIFFUSION OF SEVERAL IMPURITIES IN SILICON AND SILICON DIOXIDE
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[4] DIFFUSION OF SHALLOW IMPURITIES IN SILICON
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[5] DIFFUSION OF SHALLOW IMPURITIES IN SILICON
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[8] ON AMBIPOLAR DIFFUSION OF IMPURITIES INTO SILICON
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[9] DIFFUSION OF IMPURITIES IN POLYCRYSTALLINE SILICON
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[10] DIFFUSION OF SHALLOW IMPURITIES IN SILICON
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