Specimen Preparation in Atom Probe by FIB-Based Method

In our previous study, we proposed the optimum specimen preparation method in atom probe analysis, in which the analytical part was attached to the support needle by the physical strength of carbon deposition in connected hole. The optimum method was concluded from the point of view of the strength at the attachment part under high electric stress and fabrication feasibility. In this study, the rupture frequency of the specimens and the fabrication time were also evaluated, and an optimum method was reexamined. As a result, it was concluded that the optimum methods were the methods in which the analytical part was attached to the support needle by the physical strength of carbon deposition in connected hole and by the physical strength of the hooked joint of analytical part and support needle.