SUBSTRATE ROTATION AND CARBON GENERATION IN A MOLECULAR-BEAM EPITAXY SYSTEM

被引：9
|
作者：
FARLEY, CW
CROOK, GE
KESAN, VP
BLOCK, TR
STEVENS, HA
MATTORD, TJ
NEIKIRK, DP
STREETMAN, BG
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 05期
关键词：
D O I：
10.1116/1.583619
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1374 / 1376
页数：3
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