POLYMERIZATION IN CHF3 OXIDE ETCH DISCHARGES

被引：0
|
作者：
BARIYA, AJ [1 ]
MCVITTIE, JP [1 ]
DELARIOS, JM [1 ]
FRANK, CW [1 ]
机构：
[1] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C126 / C126
页数：1
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