MEASUREMENT OF THE MICROWAVE PROPERTIES OF MICRON-SIZED COPLANAR TRANSMISSION-LINES

被引：3

作者：

HIETALA, VM

CHAMPLIN, KS

机构：

[1] Sandia National Laboratories, Albuquerque, NM, 87185

[2] Department of Electrical Engineering, University of Minnesota, Minneapolis, MN, 55455

来源：

JOURNAL OF ELECTROMAGNETIC WAVES AND APPLICATIONS | 1991年 / 5卷 / 4-5期

关键词：

D O I：

10.1163/156939391X00176

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method of measuring the properties of micron-sized slow-wave coplanar transmission lines is presented. The transmission line's propagation constant gamma and characteristic impedance Z(o) are determined directly from the measured S-parameters of a section of transmission line. Measurements are made with microwave "on-wafer" probes. Test data from 0.5 to 40 GHz is presented on a relatively low-loss slow-wave coplanar transmission line fabricated on silicon. The measured quality factor of the transmission line is seen to approach 10 at 11 GHz with a wavelength-compression factor of approximately 5.6.

引用

页码：439 / 452

页数：14

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