MEASUREMENT OF THE MICROWAVE PROPERTIES OF MICRON-SIZED COPLANAR TRANSMISSION-LINES

被引：3
|
作者：
HIETALA, VM
CHAMPLIN, KS
机构：
[1] Sandia National Laboratories, Albuquerque, NM, 87185
[2] Department of Electrical Engineering, University of Minnesota, Minneapolis, MN, 55455
来源：
JOURNAL OF ELECTROMAGNETIC WAVES AND APPLICATIONS | 1991年 / 5卷 / 4-5期
关键词：
D O I：
10.1163/156939391X00176
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method of measuring the properties of micron-sized slow-wave coplanar transmission lines is presented. The transmission line's propagation constant gamma and characteristic impedance Z(o) are determined directly from the measured S-parameters of a section of transmission line. Measurements are made with microwave "on-wafer" probes. Test data from 0.5 to 40 GHz is presented on a relatively low-loss slow-wave coplanar transmission line fabricated on silicon. The measured quality factor of the transmission line is seen to approach 10 at 11 GHz with a wavelength-compression factor of approximately 5.6.
引用
收藏
页码：439 / 452
页数：14
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