ANGULAR-DISTRIBUTION IN SPUTTERING OF METALS BY 10 KEV INERT-GAS IONS

被引：0
|
作者：
HILDEBRANDT, D [1 ]
MANNS, R [1 ]
机构：
[1] HUMBOLDT UNIV,BEREICH ANGEW MASSESSPEKTROMETRIE,SEKT PHYS,DDR-104 BERLIN,GER DEM REP
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1979年 / 51卷 / 02期
关键词：
D O I：
10.1002/pssa.2210510256
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：K151 / K154
页数：4
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