PIEZORESISTIVE LOW-PRESSURE SENSOR WITH HIGH-SENSITIVITY AND HIGH-ACCURACY

A piezoresistive low-pressure sensor featuring a variety of advantages because of its novel design is introduced. The main objective of this development was to realize a sensor with high sensitivity, high overload capacity, and low linearity error. This publication describes the theory for the design of the piezoresistive low-pressure sensor. In comparison to familiar sensor concepts, the sensor developed for the pressure range of ± 10 kPa exhibits excellent properties (sensitivity = 35 mV/V full-scale output and linearity error = 0.05%). The sensor characteristics determined theoretically were confirmed by measurements on realized pressure sensors. © 1990.