High-Sensitivity Inductive Pressure Sensor

被引：40
|
作者：
Bakhoum, Ezzat G. [1 ]
Cheng, Marvin H. M. [2 ]
机构：
[1] Univ W Florida, Dept Elect & Comp Engn, Pensacola, FL 32514 USA
[2] W Virginia Univ, Dept Mech & Aerosp Engn, Morgantown, WV 26506 USA
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2011年 / 60卷 / 08期
关键词：
Inductance-to-frequency converter; pressure hysteresis; pressure sensor; relative permeability; temperature hysteresis; variable inductance;
D O I：
10.1109/TIM.2011.2118910
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has demonstrated a change in inductance of approximately 34.5 mH over a pressure range of 10 kPa. The sensor offers a number of desirable features, including linearity, low temperature, and pressure hysteresis, in addition to small size.
引用
收藏
页码：2960 / 2966
页数：7
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