APPLICATION OF SELF-ALIGNED COSI2 INTERCONNECTION IN SUBMICROMETER CMOS TRANSISTORS

被引：27
|
作者：
BROADBENT, EK
IRANI, RF
MORGAN, AE
MAILLOT, P
机构：
[1] SIGNET CORP,PHILIPS RES LABS SUNNYVALE,SUNNYVALE,CA 94088
[2] SIGNET CORP,ADV TECHNOL DEV,SUNNYVALE,CA 94088
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1989年 / 36卷 / 11期
关键词：
D O I：
10.1109/16.43664
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2440 / 2446
页数：7
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