ALUMINUM 2-LEVEL INTERCONNECTION FOR VLSI

被引：0

|

作者：

MORIYA, T ^{[1
]}

HAZUKI, R ^{[1
]}

SHIMA, S ^{[1
]}

CHIBA, M ^{[1
]}

KASHIWAGI, M ^{[1
]}

机构：

[1] TOSHIBA RES & DEV CTR,SAIWAI KU,KAWASAKI 210,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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收藏

页码：C104 / C104

页数：1

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