DOPING OF AMORPHOUS-SILICON BY MANGANESE ION-IMPLANTATION

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DVURECHENSKII, AV [1 ]
RYAZANTSEV, IA [1 ]
DRAVIN, VA [1 ]
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[1] PN LEBEDEV PHYS INST,MOSCOW,USSR
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T [工业技术];
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08 ;
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页码:K133 / &
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