共 50 条
- [31] Modeling gas-phase nucleation in inductively coupled silane-oxygen plasmas JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (01): : 251 - 264
- [32] THE ROLE OF SILANE GAS-PHASE CHEMISTRY IN SILICON FILM DEPOSITION AND PARTICLE NUCLEATION ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1986, 192 : 158 - COLL
- [33] Gas-phase nucleation in the tetraethylorthosilicate (TEOS)/O3 APCVD process AIChE Journal, 1997, 43 (11 A): : 2688 - 2697
- [37] LOWER-DIMENSIONAL QUANTUM STRUCTURES BY SELECTIVE GROWTH AND GAS-PHASE NUCLEATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (04): : 1660 - 1666
- [38] CREEP-FATIGUE LIFE PREDICTION IN TERMS OF NUCLEATION AND GROWTH OF FATIGUE CRACK AND CREEP CAVITIES METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1988, 19 (01): : 121 - 127