THERMODYNAMIC CONSIDERATIONS OF THERMAL-OXIDATION OF METAL SILICIDES

被引：7
|
作者：
LEE, HG
机构：
[1] Department of Mining and Metallurgical Engineering, The University of Queensland, St. Lucia
来源：
THIN SOLID FILMS | 1992年 / 216卷 / 02期
关键词：
D O I：
10.1016/0040-6090(92)90842-Y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The thermal oxidation processes of metal silicides are discussed in terms of "stable phase diagrams." Thermodynamic principles used in the construction of the diagrams are described, and diagrams for Ta-Si-O, W-Si-O and Ti-Si-O are presented with discussion. These diagrams are used in predicting and interpreting the oxidation process. Experimental results reported in the literature are explained using the diagrams.
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页码：230 / 234
页数：5
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