THERMAL-OXIDATION OF SILICIDES

被引：55

|

作者：

LIE, LN

TILLER, WA

SARASWAT, KC

机构：

[1] STANFORD UNIV,DEPT MAT SCI,STANFORD,CA 94305

[2] STANFORD UNIV,DEPT ELECT ENGN,STANFORD,CA 94305

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 07期

关键词：

D O I：

10.1063/1.334212

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2127 / 2132

页数：6

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