HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SI-SIO2 INTERFACE

被引:0
|
作者
KRIVANEK, OL [1 ]
SHENG, TT [1 ]
TSUI, DC [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:457 / 457
页数:1
相关论文
共 50 条
  • [1] HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SI-SIO2 INTERFACE
    KRIVANEK, OL
    SHENG, TT
    TSUI, DC
    APPLIED PHYSICS LETTERS, 1978, 32 (07) : 437 - 439
  • [2] REFLECTION ELECTRON-MICROSCOPY OBSERVATION OF THE SI-SIO2 INTERFACE
    HONDA, K
    TAKIZAWA, R
    OHSAWA, A
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) : 2637 - 2640
  • [3] HIGH-RESOLUTION ELECTRON-MICROSCOPY OF STRUCTURAL FEATURES AT THE SI/SIO2 INTERFACE
    CARIM, AH
    SINCLAIR, R
    MATERIALS LETTERS, 1987, 5 (03) : 94 - 98
  • [4] HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF THE ERSI2/SI(111) INTERFACE
    DANTERROCHES, C
    PERRET, P
    DAVITAYA, FA
    CHROBOCZEK, JA
    THIN SOLID FILMS, 1990, 184 : 349 - 356
  • [5] STRUCTURAL STUDY OF PTSI/(111)SI INTERFACE WITH HIGH-RESOLUTION ELECTRON-MICROSCOPY
    KAWARADA, H
    OHDOMARI, I
    HORIUCHI, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (10): : L799 - L802
  • [6] STRUCTURAL STUDY OF THE TISI2/SI(111) INTERFACE BY HIGH-RESOLUTION ELECTRON-MICROSCOPY
    CATANA, A
    HEINTZE, M
    SCHMID, PE
    STADELMANN, P
    EUREM 88, VOLS 1-3: TUTORIALS, INSTRUMENTATION AND TECHNIQUES / PHYSICS AND MATERIALS / BIOLOGY, 1988, 93 : 401 - 402
  • [7] STRUCTURAL STUDY OF THE TISI2/SI(111) INTERFACE BY HIGH-RESOLUTION ELECTRON-MICROSCOPY
    CATANA, A
    HEINTZE, M
    SCHMID, PE
    STADELMANN, P
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1988, (93): : 401 - 402
  • [8] SI-SIO2 INTERFACE EXAMINED BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY
    BLANC, J
    BUIOCCHI, CJ
    ABRAHAMS, MS
    HAM, WE
    APPLIED PHYSICS LETTERS, 1977, 30 (02) : 120 - 122
  • [9] HIGH-RESOLUTION ELECTRON-MICROSCOPY OF TITANIUM SILICIDES ON SI AND SIO2 INTERFACES
    VASILIEV, AL
    KISELEV, NA
    LEBEDEV, OI
    VASILIEV, AG
    ORLIKOVSKIJ, AA
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1991, 55 (08): : 1483 - 1486
  • [10] EVALUATION OF SIO2/(001)SI INTERFACE ROUGHNESS USING HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY AND SIMULATION
    AKATSU, H
    SUMI, Y
    OHDOMARI, I
    PHYSICAL REVIEW B, 1991, 44 (04): : 1616 - 1621